Controlled two-step solid-phase crystallization for high-performance polysilicon TFT's
نویسندگان
چکیده
منابع مشابه
Performance and reliability of SLS ELA polysilicon TFTs fabricated with novel crystallization techniques
SLS ELA polysilicon TFTs fabricated in films crystallized with several novel techniques, yielding different film microstructure and texture, were investigated. The parameter statistics indicate that the TFT performance depends on film quality and asperities, in conjunction with the grain boundary trap density. The drain current transients, upon TFT switch from OFF to ON state, showed gate oxide...
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ژورنال
عنوان ژورنال: IEEE Electron Device Letters
سال: 1997
ISSN: 0741-3106,1558-0563
DOI: 10.1109/55.605445